Show publications from
2004
"Spectroscopic studies of the Sn-based droplet laser plasma EUV source"
Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Moza Al-Rabban, Simi George, Martin Richardson
EUV Source Workshop (Santa Clara, CA) 21 February
2003
"An efficient, mass-limited, tin-doped laser plasma source for EUVL"
Chiew-Seng Koay, Kazutoshi Takenoshita, Moza Al-Rabban, Christian Keyser, Martin Richardson
International Symposium on EUV Lithography (Antwerp, Belgium) 30 September-3 October
2003
"Burst mode high power femtosecond laser propagation through the atmosphere"
Martin Richardson, Nikolai Vorobiev, Arnaud Zoubir, Robert Bernath, Richard Olmstead, Joshua Duncan
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
"Burst-mode femtosecond ablation in Copper and Lexan"
Craig Siders, Martin Richardson, Nikolai Vorobiev, Richard Olmstead, Robert Bernath, Tina Shih
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
"Burst-mode femtosecond ablation of materials"
Robert Bernath, Joshua Duncan, Peggy Gonzales, Arnaud Zoubir, Nikolai Vorobiev, Richard Olmstead, Craig Siders, Martin Richardson
International Congress on Applications of Lasers & Electro-Optics (ICALEO) (Jacksonville, FL) 14 October
2003
"Defying diffraction – High intensity femtosecond laser propagation through the atmosphere"
Martin Richardson, Robert Bernath, Joshua Duncan, Nikolai Vorobiev, Kevin Moll, Alexander Gaeta
Physics of Quantum Electronics Conference (Snowbird, UT, USA) January
2003
"Direct fabrication of waveguiding structures with a femtosecond laser"
Arnaud Zoubir, Martin Richardson, Clara Rivero, Cedric Lopez, Kathleen Richardson, Nicolas Hô, Réal Valleé
International Congress on Applications of Lasers & Electro-Optics (ICALEO) (Jacksonville, FL) 14 October
2003
"EUV Sources – the case for tin"
Martin Richardson, G. O'Sullivan
SEMATECH Workshop on Sources for EUV Lithography (Santa Clara, CA) 22 February
2003
"Femtosecond ablation scaling for different materials"
Martin Richardson, Robert Bernath, Joshua Duncan, Peggy Gonzales, Richard Olmstead, Nikolai Vorobiev
International Congress on Applications of Lasers & Electro-Optics (ICALEO) (Jacksonville, FL) 14 October
2003
"Femtosecond direct writing of waveguides in optical materials"
Arnaud Zoubir, Martin Richardson, Clara Rivero, Cedric Lopez, Kathleen Richardson
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
"Femtosecond direct-write waveguide fabrication in optical materials"
Martin Richardson, Arnaud Zoubir, Clara Rivero, Cedric Lopez, Kathleen Richardson
International Conference on Laser Processing of Materials (Munich, Germany) June
2003
"High conversion efficiency mass-limited laser plasma source for EUV lithography"
Christian Keyser, Chiew-Seng Koay, Kazutoshi Takenoshita, Martin Richardson, I.C.E. Turcu
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
"High conversion efficiency mass-limited Sn-based laser plasma source for EUV lithography"
Martin Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, I.C.E. Turcu
International Conference for El. Ion & Photon Beam Technology and Nanofabrication, American Vacuum Society (Tampa, FL) 27-29 May
2003
"High conversion efficiency Tin material laser plasma source for EUVL"
Chiew-Seng Koay, Christian Keyser, Kazutoshi Takenoshita, Moza Al-Rabban, Martin Richardson, I.C.E. Turcu, Harry Rieger, A. Stone, J. Morris
SPIE Microlithography Symposium (Santa Clara, CA) 23-28 February
2003
"High power, tunable, MHz burst-mode Q-switched Alexandrite laser system"
Nikolai Vorobiev, Martin Richardson, Somsak (Tony) Teerawattanasook, F. Levinton
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
"High-efficiency tin-based EUV sources"
Martin Richardson, Chiew-Seng Koay, Christian Keyser, Kazutoshi Takenoshita, Etsuo Fujiwara, Moza Al-Rabban
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, SPIE (San Diego, CA) volume 5196, number 14, August
2003
"High-power laser-produced-plasma radiation source for nanolithography"
I.C.E. Turcu, C. Gaeta, R. Forber, Harry Rieger, P. Hark, S. McLeod, B. Boerger, D. Bailey, J. Ben-Jacob, Martin Richardson, Christian Keyser, Kazutoshi Takenoshita, Chiew-Seng Koay
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, SPIE (San Diego, CA) volume 5196, number 10, August
2003
"Materials ablation with ultra-short laser pulses"
Martin Richardson, Nikolai Vorobiev, Craig Siders, Robert Bernath, Lawrence Shah, Arnaud Zoubir, Richard Olmstead, Joshua Duncan, Tina Shih
Directed Energy Professional Society, Directed Energy Professional Society (Boulder, CO, USA) October
2003
"Properties of Laser-Plasmas and possible Non-lethal Technology applications"
Martin Richardson
NTAR-V Conference (Crystal City) 3-6 November 2003
2003
"Radiation code calculations of tin plasma EUV emission"
Moza Al-Rabban, Martin Richardson
International Symposium on EUV Lithography30 September-3 October