Show publications from
2007
"Characterization of the Tin-doped droplet laser plasma EUV soruces for HVM"
Kazutoshi Takenoshita, Simi A. George, Chiew-Seng Koay, Jose A Cunado, Robert Bernath, Christopher G. Brown, Moza Mohammad Al-Rabban, William T. Silfvast, Martin C. Richardson
Proceedings of SPIE, Advanced lithography, volume 6517
2007
"Control and stabilization of tin-doped droplet for EUV Lithography"
Jose A Cunado, Kazutoshi Takenoshita, Simi A. George, Robert Bernath, Christopher G. Brown, Joshua J. Duncan, Martin C. Richardson
Proceedings of TECHCON (Austin, TX, USA), number P020681, 10-13 September 2007.
2007
"Experimental Demonstration of Gain Guided Lasing in an Index Anti Guided Fiber"
Ying Chen, Vikas Sudesh , Timothy S. McComb , Martin C. Richardson, Michael Bass, John Ballato, Anthony Siegman
Proceedings on Advanced Solid State Lasers
2007
"High repetition-rate LPP-source facility for EUVL"
Simi A. George, Jose A Cunado, Somsak (Tony) Teerawattanasook, Robert Bernath, Christopher G. Brown, Kazutoshi Takenoshita, Chiew-Seng Koay, Martin C. Richardson
Proceedings of SPIE, Advanced lithography, volume 6517
2007
"Tin inventory for HVM EUVL sources"
Martin C. Richardson, Kazutoshi Takenoshita
Proceedings of SPIE, Advanced lithography, volume 6517
2006
"Control of Filamentation for Enhancing Remote Detection with Laser Induced Breakdown Spectroscopy"
Matthew Fisher, Craig W. Siders, Eric Johnson, Oleksiy Andrusyak, Christopher G. Brown, Martin C. Richardson
Proceedings of SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, number 07, pages 1-5, May 2006
2006
"Detection and analysis of RF emission generated by laser-matter interactions"
Jason Aspiotis, Robert Bernath, Christopher G. Brown, Martin C. Richardson
Proceedings of SPIE. SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA), volume 6219, number 08, pages 1-8, May 2006
2006
"EUV Generation from Lithium Laser Plasma for Lithography"
Simi A. George, William T. Silfvast, Kazutoshi Takenoshita, Robert Bernath, Chiew-Seng Koay, Gregory Shimkaveg, Martin C. Richardson, Moza Mohammad Al-Rabban, H. Scott
Proceedings of SPIE, Advanced lithography, volume 6151
2006
"Femtosecond LIBS at 300 kHz
"
Matthew Fisher, Martin Richardson, L. Shah and M. E. Fermann
Laser Induced Breakdown Spectroscopy 2006 (Montreal, Canada, 2006) 5-8 September 2006
2006
"Nociceptor activation and damage by pulsed E-Fields"
Deepti Nene, Nan Jiang, Kristofer K. Rau, Martin C. Richardson
Proceedings of SPIE. SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, number 04, pages 1-12, May 2006
2006
"Observation of melt ejection in metals up to 1 µs after femtosecond laser irradiation by a novel pump-probe photography setup"
I. Mingareev, A. Horn, E.W. Kreutz
Proc. SPIE 6261, 62610A (2006)
2006
"Remote Femtosecond Laser Induced Breakdown Spectroscopy (LIBS) in a Standoff Detection Regime"
Christopher G. Brown, Robert Bernath, Matthew Fisher, Martin C. Richardson, Michael Sigman, R.A. Walters, A Miziolek, H. Bereket, Lewis E. Johnson
Proceedings of SPIE. SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, pages B1-B7, May 2006
2006
"Shock-wave generation in transparent media from ultra-fast lasers"
Robert Bernath, Christopher G. Brown, Jason Aspiotis, Matthew Fisher, Martin C. Richardson
Proceedings of SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, pages A1-A5, May 2006
2005
"Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources"
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, Martin C. Richardson
Proceedings of SPIE, volume 5751
2005
"Diagnostics for laser plasma EUV sources"
Martin C. Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Robert Bernath, Simi A. George, Somsak (Tony) Teerawattanasook
Proceedings of SPIE, volume 5580, pages 434-442
2005
"Efficient 13.5 nm EUV generation from a laser plasma"
Martin Richardson, Chiew-Seng Koay, Kazutosji Takenoshita, Simi George, Robert Bernath, Moza Al-Rabban
Quantum Electronics and Laser Science Conference (QELS)volume 3, pages 1947- 1949 , May 2005
2005
"Efficient 13.5 nm EUV generation from a laser plasma"
Martin C. Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Simi A. George, Robert Bernath, Moza Mohammad Al-Rabban
Quantum Electronics and Laser Science Conference (QELS), volume 3, pages 1947- 1949, May 2005.
2005
"EUV source parameters of the laser-produced tin-doped micro-plasma"
Martin Richardson, Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Robert Bernath, Moza Al-Rabban, H. Scott, Vivek Bakshi
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA, 2005) volume 5751-91, 1-3 March
2005
"EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas"
Simi A. George, Chiew-Seng Koay, Kazutoshi Takenoshita, Robert Bernath, Moza Mohammad Al-Rabban, Christian Keyser, H. Scott, Martin C. Richardson
Proceedings of SPIE, volume 5751
2005
"High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL"
Chiew-Seng Koay, Simi A. George, Kazutoshi Takenoshita, Robert Bernath, Etsuo Fujiwara, Martin C. Richardson
Proceedings of SPIE, volume 5751