Show presentations from
2004
"In-band high-resolution imaging of microscopic 13 laser-plasma sources."
Clarisse Mazuir, Robert Bernath, Aude Goury, Chiew-Seng Koay, Martin Richardson
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
"Ion emission characterization from microscopic laser-plasma tin-doped droplet sources"
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, Martin Richardson
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
"Laser fabricated waveguides in various materials"
Arnaud Zoubir, Martin Richardson, Clara Rivero, Alfons Schulte, Cedric Lopez, Kathleen Richardson
Conference on Lasers and Electro-Optics (CLEO) (San Francisco, CA), 17 May 2004
2004
"Model calculations of plasma expansion and EUV emission from Xe and Sn laser plasmas"
Moza Al-Rabban, Simi George, Chiew-Seng Koay, Christian Keyser, Martin Richardson
EUV Source Workshop (Santa Clara, CA) 21 February
2004
"Modeling laser-plasma sources for EUV"
Moza Al-Rabban, Martin Richardson, Thomas Blenski, Michel Pourier, Franck Gilleron, H. Scott, Vivek Bakshi
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
"Particulate debris characterization and mitigation from microscopic laser-plasma tin-doped droplet sources"
Kazutoshi Takenoshita, Chiew-Seng Koay, Simi George, Somsak (Tony) Teerawattanasook, Martin Richardson, Vivek Bakshi
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
"Precision 13 nm metrology of the microscopic tin-doped droplet laser-plasma source."
Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Robert Bernath, Etsuo Fujiwara, Martin Richardson, Vivek Bakshi
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November
2004
"Radiation transport modeling for Xe and Sn-doped droplet laser-plasma sources"
Moza Al-Rabban, Martin Richardson, Chiew-Seng Koay, Simi George, H. Scott, Vivek Bakshi
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
"Self-similar collapse in air"
Kevin Moll, Alexander Gaeta, Martin Richardson, Robert Bernath, Joshua Duncan, Nikolai Vorobiev
Conference on Lasers and Electro-Optics (CLEO) (San Francisco, CA), 17 May 2004
2004
"Spectroscopic studies of the Sn-based droplet laser plasma EUV source"
Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Moza Al-Rabban, Simi George, Martin Richardson
SPIE Microlithography Symposium (Santa Clara, CA) 22-27 February 2004
2004
"Study of the temporal evolution of dual-pulse Laser Induced Breakdown Spectroscopy (LIBS) emissions"
Cleon Barnett, Christopher Brown, Martin Richardson, Lewis Johnson
3rd International Conference on LIBS (Madrid, Spain) 21-23 September 2004
2004
"Waveguide fabrication and ablation studies in polymers with femtosecond lasers"
Stanley Maina, Arnaud Zoubir, Patrick Maury, Martin Richardson
International Symposium on Non-Oxide Glasses and New Optical Glasses (ISNOG) (Cocoa Beach, FL, USA) 7-12 November 2004