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For the past eight years we have been developing high-repetition-rate debris-free laser plasma point sources for EUV and X-ray lithography and related applications. Much of this development now focuses on plasmas produced from mass-limited high-repetition-rate (100kHz) liquid droplets.
The development of femtosecond lasers having powers in the terawatt (1012 W) range has opened pathways into many exciting new domains of physics. When focused to micro-size spots, the power density (~1020 W/cm2) provides electromagnetic fields many orders of magnitude higher than the inter-atomic field. The behavior of matter under these extreme, transient conditions exhibits many new characteristics with a wide range of applications.
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Femtosecond direct laser writing is a promising technique for the fabrication of waveguides in optical materials. The optical pen created by a tightly focused infrared laser beam allows a very deterministic processing in the femtosecond regime (1fs = 10-15 sec). Three dimensional structures can also be fabricated since the beam can penetrate through a transparent material, while the processed volume remains confined at the focus spot of the laser. This technique should enable the fabrication of both passive and active 3D photonic devices for integrated optical circuits.
X-ray microscopy in principle can provide higher spatial resolution than optical microscopy, while preserving the structural integrity of biological specimens in a way that cannot be ensured with electron beam microscopy (SEM, TEM).
Research has shown that high-powered femtosecond laser pulses have significant advantages over conventional nanosecond laser pulses for materials micro-machining and micro-processing. These technologies are playing an increasing role in diverse industries including those centered in micro-electronics, bio-tech, aerospace, optoelectronics, and medical engineering.
The research program of the Laser Development Laboratory seeks to expand the boundaries of solid state laser capabilities by undertaking laser research projects, many funded by industry, that exploit new laser media, new pumping technology, and innovative resonator design.
The Laser Spectroscopy and Sensing Laboratory research is focused on the interaction of
a broad range of laser intensities (up to 1014 W.cm-2), wavelengths
(from the UltraViolet to the MicroWave region) and pulse durations (from Continuous Waves
to tens of femtosecond) with matter. The fundamental research in the laboratory is conducted
with an idea of applications and development of Laser Sensing schemes and technologies
(Laser-Induced Breakdown Spectroscopy for instance).