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Title: Backside Surface Machining of Silicon Wafers Using a Nanosecond Tm:fiber MOPA System
Authors: Lawrence Shah, Tobias Bonhoff, Ashraf F. El-Sherif, Pankaj K. Kadwani, Martin Gebhardt, Christian Gaida, Martin Richardson
Reference: CLEO: QELS_Fundamental Science 2013, paper JTh2A.07 (2013)
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